A Simple Key For Noohapou Unveiled
A Simple Key For Noohapou Unveiled
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distant destinations: Static models are generally situated remotely, rising Expense and reducing In general process performance.
thirty% of its peak energy usage, offering our prospects sizeable reduction in working expenditures and enhanced trustworthiness.
the data under is categorized by semiconductor approach and Instrument maker. Each individual table involves an Applications Matrix that displays qulified and professional processes.
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This remarkable procedure, supplying a small type variable, low priced-of-possession and Dynamic Temperature Management provided approach and gear engineers a fresh Device to enhance their temperature sensitive procedures.
We are guided inside our perception that prosperity With this aggressive sector stems from supplying buyers with very engineered new goods and globe course customer service.
The precision of your POU 3500 permits unbiased control of the method fluid temperature on the wafer chuck inside +/- 0.1 °C get more info of established issue, as well as the fast reaction time on the program makes it possible for for optimum wafer-to-wafer repeatability throughout the etch method.
While using the POU3300, you could reach unparalleled brings about etch performance, chamber uptime, diminished cost of ownership and fab Place utilization – all whilst enhancing your procedure reliability.
Large Footprint: Static models occupy substantial House within the fabrication Instrument space, cutting down its efficiency.
Dynamic Temperature Control, as executed in devices just like the LAUDA-Noah POU, can be an method that senses the temperature of the method fluid returning from the method chamber’s wafer chuck (ESC) and dynamically adjusts the temperature from the equipped procedure fluid based upon this real-time suggestions.
The data established here is from the 200mm quantity production wafer fab and clearly illustrates the good thing about the LAUDA-Noah POU program.
a lot more than at any time, shrinking system geometries, demanding new processes plus a highly competitive surroundings call for temperature control units that Blend quickly and correct temperature control with the emphasis on diminished working costs and enhanced reliability.
Confirmed; TEs' symbolize only one Component of a chiller's design and style. The switching & Handle approaches employed by a chiller will effect the TEs' reliability.
(consequently, installing a static device next to chamber won't permit it to provide dynamic temperature control)
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